“KVU-Zerkalo” vacuum deposition line

Project Prerequisites:

Need for reliable control system for a new unit.

Goal of the Project:

Development of a control system (CS) of a throughput vacuum highly productive unit KVU-Zerkalo.

Description of the Project:

Performance of KVU-Zerkalo corresponds to 24 VU-2M units when applying mirror coating on 400x200 mm substrates at power inputs equivalent to a single VU-2M unit.

CS controls the operation of all mechanisms of the unit and due to advanced communication system, it “communicates” with the magnetron and ion source power supplies, vacuum gauges, computer, etc.

To optimize the project, for its continued support and expansion, several programming languages were used for the development of PLC software, corresponding to IEC 61131-3 standard, as well as analytical methods for PID controller tuning that controls the inflow of argon in the deposition chamber through the proportional valve by SMC of PVQ series using PWM, thereby maintaining pressure in the deposition chamber according to the technological map.

Software of the operator’s AWP was developed in an integrated development environment Visual Studio using standard libraries of our company.

Results of the Project:

  • The developed software has an intuitive interface and allows personnel to control the unit without long training;

  • Operator’s AWP allows to archive all operating parameters, alarms, events and operator’s actions;

  • The possibility of maintaining technological maps base was implemented;

  • This type of equipment allows to apply optical coatings of significantly less cost than at serial units VU-2M and VU-1A and having better performance.